Microstructures for high-energy x-ray and particle imaging applications

Journal Article · Sun Nov 01 04:00:00 EST 1981 · J. Vac. Sci. Technol.; (United States)

DOI:https://doi.org/10.1116/1.571228· OSTI ID:5890895

Ceglio, N M; Stone, G F; Hawryluk, A M

Coded imaging techniques using thick, micro-Fresnel zone plates as coded apertures have been used to image x-ray emission (2--20 keV) and 3.5 MeV Alpha particle emissions from laser driven micro-implosions. Image resolution in these experiments was 3--8 ..mu..m. Extension of this coded imaging capability to higher energy x rays (approx.100 KeV) and more penetrating charged particles (e.g., approx.15 MeV protons) requires the fabrication of very thick (50--200 ..mu..m), high aspect ratio (10:1), gold Fresnel zone plates with narrow linewidths (5--25 ..mu..m) for use as coded apertures. A reactive ion etch technique in oxygen has been used to produce thick zone plate patterns in polymer films. The polymer patterns serve as electroplating molds for the subsequent fabrication of the free-standing gold zone plate structures.

• Research Organization: University of California, Lawrence Livermore National Laboratory, Livermore, California 94550
• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 5890895
• Journal Information: J. Vac. Sci. Technol.; (United States), Journal Name: J. Vac. Sci. Technol.; (United States) Vol. 19:4; ISSN JVSTA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360101* -- Metals & Alloys-- Preparation & Fabrication
ALPHA SOURCES
ASPECT RATIO
BEAMS
CHARGED PARTICLE DETECTION
CHARGED PARTICLES
CONFINEMENT
DEPOSITION
DETECTION
DEUTERIUM COMPOUNDS
DEUTERIUM TRITIDES
DIAGNOSTIC TECHNIQUES
DIMENSIONS
DISTRIBUTION
ELECTRODEPOSITION
ELECTROLYSIS
ELECTROMAGNETIC RADIATION
ELECTROPLATING
ELEMENTS
ENERGY RANGE
ENERGY SPECTRA
ETCHING
FABRICATION
FILMS
GOLD
HYDROGEN COMPOUNDS
IMAGE PROCESSING
IMAGES
IMPLOSIONS
INERTIAL CONFINEMENT
ION BEAMS
ION DETECTION
ION SOURCES
IONIZING RADIATIONS
IONS
KEV RANGE
KEV RANGE 01-10
KEV RANGE 10-100
LABELLED COMPOUNDS
LASER IMPLOSIONS
LYSIS
MASKING
METALS
MEV RANGE
MEV RANGE 01-10
MEV RANGE 10-100
MICROSCOPY
MICROSPHERES
OXYGEN IONS
PARTICLE SOURCES
PLASMA CONFINEMENT
PLATING
POLYMERS
PROCESSING
RADIATION DETECTION
RADIATION SOURCES
RADIATIONS
RESOLUTION
SPATIAL DISTRIBUTION
SPECTRA
SURFACE COATING
SURFACE FINISHING
THICKNESS
TOMOGRAPHY
TRANSITION ELEMENTS
TRITIUM COMPOUNDS
ULTRAVIOLET RADIATION
X RADIATION
X-RAY DETECTION
ZONES