High deposition rate preparation of amorphous silicon solar cells by rf glow discharge decomposition of disilane
The optical and electrical properties of hydrogenated amorphous silicon films produced by rf glow discharge decomposition of disilane diluted in helium (Si/sub 2/H/sub 6//He = 1/9) have been studied while systematically varying the film deposition rate. The properties and composition of the films were monitored by measuring the optical band gap, IR vibrational spectrum, dark conductivity, and the photoconductivity as a function of the deposition rate. The photoluminescence of the high deposition rate films gave a peak at 1.33 eV. These films, whose properties are rather similar to those of the conventional a-Si:H films prepared from monosilane, have been used to fabricate nip-type a-Si:H solar cells. At a deposition rate of 11 A/sec, a conversion efficiency of 6.86% was obtained. This high efficiency shows that disilane is applicable for mass production fabrication of a-Si:H solar cells.
- Research Organization:
- Tokyo Institute of Technology, 2-12-1, Ohokayama, Meguro-ku, Tokyo 152, Japan
- OSTI ID:
- 5645540
- Journal Information:
- J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 55:2; ISSN JAPIA
- Country of Publication:
- United States
- Language:
- English
Similar Records
Disilane versus monosilane: a comparison of the properties of glow-discharge a-Si:H films and solar cells
Hydrogenated amorphous silicon films prepared by glow discharge of disilane
Related Subjects
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360603 -- Materials-- Properties
AMORPHOUS STATE
BORON IONS
CARBIDES
CARBON COMPOUNDS
CHARGED PARTICLES
CHEMICAL COMPOSITION
CHEMICAL REACTIONS
CRYSTAL DOPING
DECOMPOSITION
DEPOSITION
DIRECT ENERGY CONVERTERS
DOPED MATERIALS
EFFICIENCY
ELECTRIC CONDUCTIVITY
ELECTRIC DISCHARGES
ELECTRICAL PROPERTIES
ELEMENTS
ENERGY GAP
EQUIPMENT
FABRICATION
FILMS
GLOW DISCHARGES
HYDRIDES
HYDROGEN COMPOUNDS
HYDROGENATION
IONS
LUMINESCENCE
MATERIALS
OPTICAL PROPERTIES
PHOSPHORUS IONS
PHOTOELECTRIC CELLS
PHOTOLUMINESCENCE
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
SEMIMETALS
SILANES
SILICON
SILICON CARBIDES
SILICON COMPOUNDS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING