High repetition rate uniform volume transverse electric discharger laser with pulse triggered multi-arc channel switching
Patent
·
OSTI ID:5618153
A high power excimer laser emits a pulsed output at a high repetition rate in the ultraviolet wavelength region and a uniform power output across the laser beam. By subjecting doped silicon wafers to the pulsed laser output, epitaxial regrowth of silicon crystals can be induced to repair damage to the silicon crystal structure which normally occurs during implantation of the dopant materials.
- Assignee:
- EDB-85-115007
- Patent Number(s):
- US 4498183
- OSTI ID:
- 5618153
- Country of Publication:
- United States
- Language:
- English
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Pulsed excimer laser (308 nm) annealing of ion implanted silicon and solar cell fabrication
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Laser annealing of ion implanted silicon
Journal Article
·
Fri Dec 31 23:00:00 EST 1982
· Mater. Res. Soc. Symp. Proc.; (United States)
·
OSTI ID:6692944
Pulsed excimer-laser (308 nm) annealing of ion-implanted silicon and solar-cell fabrication
Conference
·
Fri Oct 01 00:00:00 EDT 1982
·
OSTI ID:6648812
Laser annealing of ion implanted silicon
Conference
·
Sat Apr 14 23:00:00 EST 1979
· AIP (Am. Inst. Phys.) Conf. Proc.; (United States)
·
OSTI ID:6260307
Related Subjects
42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
ANNEALING
CRYSTAL GROWTH
DIRECT ENERGY CONVERTERS
DOPED MATERIALS
ELECTRIC DISCHARGES
ELECTROMAGNETIC RADIATION
ELEMENTS
EPITAXY
EQUIPMENT
HEAT TREATMENTS
ION IMPLANTATION
LASER RADIATION
LASERS
MATERIALS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
RADIATIONS
REPAIR
SEMICONDUCTOR DEVICES
SEMICONDUCTOR LASERS
SEMIMETALS
SILICON
SOLAR CELLS
SOLAR EQUIPMENT
ULTRAVIOLET RADIATION
WAVELENGTHS
420300* -- Engineering-- Lasers-- (-1989)
ANNEALING
CRYSTAL GROWTH
DIRECT ENERGY CONVERTERS
DOPED MATERIALS
ELECTRIC DISCHARGES
ELECTROMAGNETIC RADIATION
ELEMENTS
EPITAXY
EQUIPMENT
HEAT TREATMENTS
ION IMPLANTATION
LASER RADIATION
LASERS
MATERIALS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
RADIATIONS
REPAIR
SEMICONDUCTOR DEVICES
SEMICONDUCTOR LASERS
SEMIMETALS
SILICON
SOLAR CELLS
SOLAR EQUIPMENT
ULTRAVIOLET RADIATION
WAVELENGTHS