The ECR-plasma deposition of silicon nitride on a tunnel oxide
Conference
·
OSTI ID:5606425
- Sandia National Labs., Albuquerque, NM (USA)
- Michigan Univ., Ann Arbor, MI (USA). Dept. of Nuclear Engineering
Gate dielectric-quality silicon nitride films were deposited on a tunnel oxide from an SiH{sub 4}/N{sub 2} gas mixture using an electron cyclotron resonance (ECR) plasma. Electrical characteristics depend not only upon the quality of the nitride film but also upon the state of the interfacial oxide. Quasi-static and 1 MHz capacitance-voltage measurements show that a nitride film deposited at 200{degrees}C on 2 nm thick thermally-grown oxide (tunnel oxide) on an unbiased Si substrate has an interface state density of 1.5 {times} 10{sup 11} /cm{sup 2}-eV. Time-of-flight elastic recoil detection (TOF-ERD) was used to examine the level of mixing between the tunnel oxide and the deposited silicon nitride as a function of bias voltage. TOF-ERD showed that for an applied bias of {minus}350 V (ion energy {approx} 380 eV), the deposition of a 10 nm thick film was completely mixed to form an oxynitride whereas the tunnel oxide remained intact for an unbiased sample. (Interdiffusion resulting from energetic-beam heating was ruled-out as a possibility for the mixing.) 13 refs., 4 figs.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (USA)
- Sponsoring Organization:
- DOE; USDOE, Washington, DC (USA)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 5606425
- Report Number(s):
- SAND-90-3100C; CONF-910406--25; ON: DE91014665
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
656003* -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CYCLOTRON RESONANCE
DEPOSITION
ELECTRIC PROBES
ELECTRON CYCLOTRON-RESONANCE
ELEMENTS
ENERGY BEAM DEPOSITION
LANGMUIR PROBE
MATERIALS
MONTE CARLO METHOD
NITRIDES
NITROGEN
NITROGEN COMPOUNDS
NONMETALS
PNICTIDES
PROBES
RESONANCE
SEMICONDUCTOR MATERIALS
SILICON COMPOUNDS
SILICON NITRIDES
SUBSTRATES
SURFACE COATING
TIME-OF-FLIGHT METHOD
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
656003* -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CYCLOTRON RESONANCE
DEPOSITION
ELECTRIC PROBES
ELECTRON CYCLOTRON-RESONANCE
ELEMENTS
ENERGY BEAM DEPOSITION
LANGMUIR PROBE
MATERIALS
MONTE CARLO METHOD
NITRIDES
NITROGEN
NITROGEN COMPOUNDS
NONMETALS
PNICTIDES
PROBES
RESONANCE
SEMICONDUCTOR MATERIALS
SILICON COMPOUNDS
SILICON NITRIDES
SUBSTRATES
SURFACE COATING
TIME-OF-FLIGHT METHOD