Characterization of tungsten, tungsten oxide, and platinum cluster films fabricated by laser-assisted chemical vapor deposition
Optically transparent tungsten, tungsten oxide, and platinum thin films have been fabricated by laser-assisted chemical vapor deposition (LCVD) through multiphoton and/or single photon dissociation of organometallic precursors. The films were characterized by FTIR, Raman and UV-visible spectroscopies, refractive index measurements, transmission electron microscopy (TEM), and electron diffraction to elucidate the gas phase processes which govern deposition. These methods provide evidence to support the assertion that clusters and ultrafine metal particles form in the gas phase by coalescence growth and deposit onto substrates, maintaining their cluster form to create porous, polymorphous films. Post-deposition studies of the films were conducted to compare the different chemistry of these materials, and evaluate them for potential applications. Post-deposition oxidation of the tungsten films led to metal-centered chemistry whereas similar treatment of the platinum films led to the oxidation and volatilization of the organic ligands while leaving the platinum microstructure intact. Post-deposition oxidation of the tungsten films was compared to simultaneous deposition-oxidation, providing the first study of reactive LCVD.
- Research Organization:
- Syracuse Univ., NY (United States)
- OSTI ID:
- 5605712
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360601 -- Other Materials-- Preparation & Manufacture
360602* -- Other Materials-- Structure & Phase Studies
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CHEMISTRY
COALESCENCE
COHERENT SCATTERING
DEPOSITION
DIFFRACTION
DISSOCIATION
ELECTRON DIFFRACTION
ELECTRON MICROSCOPY
ELEMENTS
FILMS
INFRARED SPECTRA
METALS
MICROSCOPY
MICROSTRUCTURE
MOLECULAR CLUSTERS
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL CHEMISTRY
PHYSICAL PROPERTIES
PLATINUM
PLATINUM METALS
RAMAN SPECTRA
REFRACTIVE INDEX
REFRACTORY METAL COMPOUNDS
SCATTERING
SPECTRA
STRUCTURAL CHEMICAL ANALYSIS
SURFACE COATING
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
TRANSMISSION ELECTRON MICROSCOPY
TUNGSTEN
TUNGSTEN COMPOUNDS
TUNGSTEN OXIDES
ULTRAVIOLET SPECTRA
VISIBLE SPECTRA