Deactivation of group III acceptors in silicon during keV electron irradiation
Experimental results on p-Si metal-oxide-semiconductor capacitors (MOSC's) are presented which demonstrate the electrical deactivation of the acceptor dopant impurity during 8-keV electron irradiation not only in boron but also aluminum and indium-doped silicon. The deactivation rates of the acceptors during the 8-keV electron irradiation are nearly independent of the acceptor impurity type. The final density of the remaining active acceptor approaches nonzero values N/sub infinity/, with N/sub infinity/(B)Al--H>In-H. These deactivation results are consistent with our hydrogen bond model. The thermal annealing or regeneration rate of the deactivated acceptors in the MOSC's irradiated by 8-keV electron is much smaller than that in the MOSC's that have undergone avalanche electron injection, indicating that the keV electron irradiation gives rise to stronger hydrogen-acceptor bond.
- Research Organization:
- Solid State Electronics Laboratory, Department of Electrical and Computer Engineering and Department of Physics, University of Illinois at Urbana--Champaign, Urbana, Illinois 61801
- OSTI ID:
- 5598321
- Journal Information:
- Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 43:10; ISSN APPLA
- Country of Publication:
- United States
- Language:
- English
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46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALUMINIUM IONS
ANNEALING
BORON IONS
CAPACITORS
CARRIER DENSITY
CHALCOGENIDES
CHARGED PARTICLES
CHEMICAL BONDS
COLLISIONS
DEACTIVATION
ELECTRICAL EQUIPMENT
ELECTRICAL PROPERTIES
ELECTRON COLLISIONS
ELECTRONS
ELEMENTARY PARTICLES
ELEMENTS
ENERGY RANGE
EQUIPMENT
FERMIONS
HEAT TREATMENTS
IMPURITIES
INDIUM IONS
ION IMPLANTATION
IONS
KEV RANGE
KEV RANGE 01-10
LEPTONS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PHYSICAL RADIATION EFFECTS
RADIATION EFFECTS
SEMIMETALS
SILICON