Properties of amorphous silicon tin alloys produced using the radio frequency glow discharge technique
Journal Article
·
· Appl. Phys. Lett.; (United States)
Amorphous silicon tin films have been deposited by the glow discharge technique using SiH/sub 4/, H/sub 2/, and SnCl/sub 4/ or Sn (CH/sub 3/)/sub 4/ gas mixtures. An n to p-type conductivity transition with increasing Sn content in the films is found for both types of Sn alloying sources. Such a transition satisfactorily explains the observed dark and light conductivity behavior.
- Research Organization:
- Solar Energy Research Institute, Golden, Colorado 80401
- DOE Contract Number:
- AC02-77CH00178
- OSTI ID:
- 5597859
- Journal Information:
- Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 44:2; ISSN APPLA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360603* -- Materials-- Properties
ALLOYS
AMORPHOUS STATE
DEPOSITION
ELECTRIC CONDUCTIVITY
ELECTRIC DISCHARGES
ELECTRICAL PROPERTIES
ENERGY GAP
FILMS
GLOW DISCHARGES
MATERIALS
N-TYPE CONDUCTORS
P-TYPE CONDUCTORS
PHOTOCONDUCTIVITY
PHYSICAL PROPERTIES
SEMICONDUCTOR MATERIALS
SILICON ALLOYS
TIN ALLOYS
360603* -- Materials-- Properties
ALLOYS
AMORPHOUS STATE
DEPOSITION
ELECTRIC CONDUCTIVITY
ELECTRIC DISCHARGES
ELECTRICAL PROPERTIES
ENERGY GAP
FILMS
GLOW DISCHARGES
MATERIALS
N-TYPE CONDUCTORS
P-TYPE CONDUCTORS
PHOTOCONDUCTIVITY
PHYSICAL PROPERTIES
SEMICONDUCTOR MATERIALS
SILICON ALLOYS
TIN ALLOYS