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Properties of amorphous silicon tin alloys produced using the radio frequency glow discharge technique

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.94716· OSTI ID:5597859
Amorphous silicon tin films have been deposited by the glow discharge technique using SiH/sub 4/, H/sub 2/, and SnCl/sub 4/ or Sn (CH/sub 3/)/sub 4/ gas mixtures. An n to p-type conductivity transition with increasing Sn content in the films is found for both types of Sn alloying sources. Such a transition satisfactorily explains the observed dark and light conductivity behavior.
Research Organization:
Solar Energy Research Institute, Golden, Colorado 80401
DOE Contract Number:
AC02-77CH00178
OSTI ID:
5597859
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 44:2; ISSN APPLA
Country of Publication:
United States
Language:
English

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