Charged particle beam scanning apparatus
Patent
·
OSTI ID:5586753
A charged particle beam scanning apparatus includes a deflector for a beam of charged particles which includes a magnetic field generator to supply an incoming electron beam with a magnetic field whose intensity grows higher in the opposite direction to that in which the beam is deflected.
- Assignee:
- Tokyo Shibaura Electric Co Ltd (Japan)
- Patent Number(s):
- US 4198565
- OSTI ID:
- 5586753
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
43 PARTICLE ACCELERATORS
430100* -- Particle Accelerators-- Design
Development
& Operation
430200 -- Particle Accelerators-- Beam Dynamics
Field Calculations
& Ion Optics
ACCELERATORS
BEAM MONITORS
BEAM SCANNERS
BEAMS
DESIGN
ELECTRON BEAMS
EQUIPMENT
LEPTON BEAMS
LINEAR ACCELERATORS
MAGNETIC FIELDS
MEASURING INSTRUMENTS
MONITORS
PARTICLE BEAMS
X-RAY EQUIPMENT
430100* -- Particle Accelerators-- Design
Development
& Operation
430200 -- Particle Accelerators-- Beam Dynamics
Field Calculations
& Ion Optics
ACCELERATORS
BEAM MONITORS
BEAM SCANNERS
BEAMS
DESIGN
ELECTRON BEAMS
EQUIPMENT
LEPTON BEAMS
LINEAR ACCELERATORS
MAGNETIC FIELDS
MEASURING INSTRUMENTS
MONITORS
PARTICLE BEAMS
X-RAY EQUIPMENT