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U.S. Department of Energy
Office of Scientific and Technical Information

Charged particle beam scanning apparatus

Patent ·
OSTI ID:5586753

A charged particle beam scanning apparatus includes a deflector for a beam of charged particles which includes a magnetic field generator to supply an incoming electron beam with a magnetic field whose intensity grows higher in the opposite direction to that in which the beam is deflected.

Assignee:
Tokyo Shibaura Electric Co Ltd (Japan)
Patent Number(s):
US 4198565
OSTI ID:
5586753
Country of Publication:
United States
Language:
English