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Annealing behavior of light-induced defects in boron-doped hydrogenated amorphous silicon alloys

Journal Article · · J. Appl. Phys.; (United States)
DOI:https://doi.org/10.1063/1.334835· OSTI ID:5586063

Light-induced effects in lightly boron-doped hydrogenated amorphous silicon alloys have been studied in coplanar and sandwich sample configurations. It is observed that metastable changes in these films anneal out at a significantly lower temperature (< or = 100 /sup 0/C) than in undoped films.

Research Organization:
Energy Conversion Devices, Incorporated, 1675 West Maple Road, Troy, Michigan 48084
OSTI ID:
5586063
Journal Information:
J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 57:12; ISSN JAPIA
Country of Publication:
United States
Language:
English