Properties and photovoltaic applications of microcrystalline silicon films prepared by RF reactive sputtering
Journal Article
·
· J. Appl. Phys.; (United States)
Undoped, phosphorus-, and boron-doped microcrystalline silicon films were prepared by RF reactive sputtering, and their properties were investigated through structural, optical, and transport measurements. The merits of microcrystalline films for the p and n contacts in photovoltaic devices were demonstrated through the fabrication of single and tandem p-i-n solar-cell structures with best efficiencies between 5 and 6%.
- Research Organization:
- Corporate Research Laboratory, Exxon Research and Engineering Company, Annandale, New Jersey 08801
- OSTI ID:
- 5584008
- Journal Information:
- J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 58:2; ISSN JAPIA
- Country of Publication:
- United States
- Language:
- English
Similar Records
Sputtered amorphous silicon solar cells. Final report, 22 July 1982-22 July 1983
High efficiency amorphous silicon solar cells fabricated by reactive sputtering
Method for sputtering a PIN microcrystalline/amorphous silicon semiconductor device with the P and N-layers sputtered from boron and phosphorous heavily doped targets
Technical Report
·
Sat Sep 01 00:00:00 EDT 1984
·
OSTI ID:6284011
High efficiency amorphous silicon solar cells fabricated by reactive sputtering
Conference
·
Sun May 01 00:00:00 EDT 1983
· Proc. - Electrochem. Soc.; (United States)
·
OSTI ID:6204785
Method for sputtering a PIN microcrystalline/amorphous silicon semiconductor device with the P and N-layers sputtered from boron and phosphorous heavily doped targets
Patent
·
Mon Apr 01 23:00:00 EST 1985
·
OSTI ID:865390
Related Subjects
14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
AMORPHOUS STATE
CHARGED-PARTICLE TRANSPORT
DIRECT ENERGY CONVERTERS
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
JUNCTIONS
OPACITY
OPTICAL PROPERTIES
P-N JUNCTIONS
PHOTOELECTRIC CELLS
PHOTOELECTROMAGNETIC EFFECTS
PHOTOVOLTAIC CELLS
PHOTOVOLTAIC EFFECT
PHYSICAL PROPERTIES
RADIATION TRANSPORT
SEMICONDUCTOR JUNCTIONS
SEMIMETALS
SILICON
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
THIN FILMS
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
AMORPHOUS STATE
CHARGED-PARTICLE TRANSPORT
DIRECT ENERGY CONVERTERS
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
JUNCTIONS
OPACITY
OPTICAL PROPERTIES
P-N JUNCTIONS
PHOTOELECTRIC CELLS
PHOTOELECTROMAGNETIC EFFECTS
PHOTOVOLTAIC CELLS
PHOTOVOLTAIC EFFECT
PHYSICAL PROPERTIES
RADIATION TRANSPORT
SEMICONDUCTOR JUNCTIONS
SEMIMETALS
SILICON
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
THIN FILMS