Fine-grained base electrode process for Pb-alloy Josephson technology

Journal Article · Sat Oct 01 04:00:00 EDT 1983 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.572226· OSTI ID:5553836

Bright, A A; Klepner, S P

A method of producing fine-grained PbInAu thin films reported by Huang and co-workers has been evaluated for use in Josephson technology integrated circuits. Both junction-related and nonjunction characteristics of the base electrode layer were considered. It was found necessary to interchange the order of deposition of two of the layers in the vertical structure and to modify the homogenization step in the base electrode process. The fine grain size of the films was found to be due to the presence of a layer of AuIn/sub 2/ precipitates which impede grain growth.

• Research Organization: IBM T. J. Watson Research Center, Yorktown Heights, New York 10598
• OSTI ID: 5553836
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 1:4; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

420201* -- Engineering-- Cryogenic Equipment & Devices
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALLOYS
BACKSCATTERING
COMPARATIVE EVALUATIONS
CURRENT DENSITY
DEPOSITION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRODES
ELECTRON MICROSCOPY
ELECTRONIC CIRCUITS
ELEMENTS
ENERGY SPECTRA
FABRICATION
FILMS
GOLD
HIGH VACUUM
INDIUM
INTEGRATED CIRCUITS
JOSEPHSON JUNCTIONS
JUNCTIONS
LEAD ALLOYS
METALS
MICROELECTRONIC CIRCUITS
MICROSCOPY
PHYSICAL PROPERTIES
SCATTERING
SPECTRA
SPUTTERING
SUPERCONDUCTING JUNCTIONS
SURFACE COATING
THIN FILMS
TRANSITION ELEMENTS
TRANSMISSION ELECTRON MICROSCOPY
VACUUM COATING