Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Distributions of residual stress, dislocations, and EL2 in Czochralski-grown semi-insulating GaAs

Journal Article · · J. Appl. Phys.; (United States)
DOI:https://doi.org/10.1063/1.337670· OSTI ID:5540801
Distributions of stress, dislocations, and the EL2 midgap defect have been optically mapped in semi-insulating GaAs wafers, from (100)-grown crystals created by the liquid-encapsulated Czochralski method. The evolution of EL2 along the growth axis indicates that assessment of this property through the majority of the crystal volume is often poorly represented by wafers from near the two end regions. A comparison of maps for stress, dislocation and EL2 patterns as all measured with a given wafer does not support hypotheses that EL2 is a direct consequence either of stress or of dislocations. Other mechanisms, such as segregation and melt dynamics, thus appear more likely to control the formation and distribution of EL2.
Research Organization:
Oregon Graduate Center, Beaverton, Oregon 97006
DOE Contract Number:
AC04-76DP00789
OSTI ID:
5540801
Journal Information:
J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 60:1; ISSN JAPIA
Country of Publication:
United States
Language:
English