Range of 120 keV ions in solids. [Ion mass range: 24 to 209]

Journal Article · Thu Feb 01 04:00:00 EST 1979 · IEEE Trans. Nucl. Sci.; (United States)

DOI:https://doi.org/10.1109/TNS.1979.4330381· OSTI ID:5535246

Santry, D C; Werner, R D; Westcott, O M

A variety of heavy ions covering the mass range /sup 24/Mg to /sup 209/Bi were implanted at 120 keV using an electromagnetic isotope separator. Depth profiles of the implanted ions in thick targets of Be, C, Al, and Si were measured by He ion backscattering analysis. The measured range and range straggling of heavy ions were found to be in reasonable agreement with theory.

• Research Organization: Atomic Energy of Canada Ltd., Chalk River, Ontario
• OSTI ID: 5535246
• Journal Information: IEEE Trans. Nucl. Sci.; (United States), Journal Name: IEEE Trans. Nucl. Sci.; (United States) Vol. NS-26:1; ISSN IETNA
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
654001 -- Radiation & Shielding Physics-- Radiation Physics
Shielding Calculations & Experiments
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
73 NUCLEAR PHYSICS AND RADIATION PHYSICS
ALKALINE EARTH METALS
ALUMINIUM
BACKSCATTERING
BERYLLIUM
CARBON
CHARGED PARTICLES
COLLISIONS
DATA
DATA FORMS
ELEMENTS
ENERGY RANGE
EXPERIMENTAL DATA
GRAPHS
HEAVY IONS
HELIUM IONS
INFORMATION
ION IMPLANTATION
IONS
KEV RANGE
KEV RANGE 100-1000
METALS
NONMETALS
NUMERICAL DATA
RANGE
SCATTERING
SEMIMETALS
SILICON
TABLES