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Thermal behavior and range distribution of /sup 209/Bi implanted into the Al/V bilayer structure

Journal Article · · J. Appl. Phys.; (United States)
DOI:https://doi.org/10.1063/1.340161· OSTI ID:5419799
350-keV /sup 209/Bi/sup +/ was implanted into an Al (1000 A)/V bilayer system. The Bi depth distribution measured by Rutherford backscattering agrees well with predictions obtained via the Monte-Carlo simulation method (t-smcapsr-smcapsIm-smcaps code). Diffusion coefficients for Bi in both the V substrate of the Al/V system and the pure V foil are extracted after thermal annealings in a temperature range between 200 and 700 /sup 0/C. The results show that the Bi ions follow a hindered diffusion at the Al film of the Al/V bilayer and for temperatures higher than 580 /sup 0/C diffuse regularly in the V bulk.
Research Organization:
Instituto de Fisica, Universidade Federal do Rio Grande do Sul, 90049 Porto Alegre, RS, Brazil
OSTI ID:
5419799
Journal Information:
J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 63:9; ISSN JAPIA
Country of Publication:
United States
Language:
English