Mean projected range and range straggling of 50- to 400-keV Hg/sup +/ in glass
Journal Article
·
· J. Appl. Phys.; (United States)
The range profile of Hg/sup +/ implanted at energies from 50 to 400 keV in glass was measured by /sup 4/He/sup +/ Rutherford backscattering. The measured projected ranges are in good agreement with those predicted by the Biersack model. A marked improvement in the range straggling fit is obtained after considering the second-order energy loss.
- Research Organization:
- Center of Theoretical Physics, China Center of Advanced Science and Technology, (World Lab.), Beijing and Department of Physics, Shandong University, Jinan, Shandong, China
- OSTI ID:
- 7127378
- Journal Information:
- J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 64:7; ISSN JAPIA
- Country of Publication:
- United States
- Language:
- English
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