Native oxide encapsulation for annealing boron-implanted Hg(1-x)Cd(x)Te

Technical Report · Mon Aug 25 04:00:00 EDT 1986

OSTI ID:5529313

Kao, T M; Sigmon, T W

The use of Hg/sub 1-x/CdxTe(MCT) in infrared photovoltaic focal plane arrays would benefit considerably from a planar device fabrication process, such as is offered by ion implantation. Implantation would allow selective doping and eliminate the present mesa process used for these structures. However, the effect most often observed in implanted MCT is a radiation damage induced n electrical activity which results in junctions several times deeper than the atomic profile of the implanted impurity. This result causes difficulty in achieving precise control of the implanted junctions. Also, further heat treatments often used in processing are found to cause changes in the properties of this defect layer. In this work, we describe a native oxide encapsulation process capable of withstanding rapid thermal annealing (RTA) or long-time furnace annealing without Hg over pressure or loss from the substrate. We report for the first time electrical activation of implanted B along with implantation damage removal using this native oxide as an annealing encapsulant.

• Research Organization: Stanford Univ., CA (USA). Stanford Electronics Labs.
• OSTI ID: 5529313
• Report Number(s): AD-A-185576/6/XAB
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
140501 -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360605* -- Materials-- Radiation Effects
ANNEALING
BORON IONS
CADMIUM COMPOUNDS
CADMIUM TELLURIDES
CHALCOGENIDES
CHARGED PARTICLES
CONTROL
DAMAGE
DIRECT ENERGY CONVERTERS
ELECTRICAL PROPERTIES
ELECTROMAGNETIC RADIATION
ENCAPSULATION
EQUIPMENT
FABRICATION
FURNACES
HEAT TREATMENTS
IMPURITIES
ION IMPLANTATION
IONS
JUNCTIONS
LAYERS
MERCURY COMPOUNDS
MERCURY TELLURIDES
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
RADIATIONS
REMOVAL
SOLAR CELLS
SOLAR EQUIPMENT
SUBSTRATES
TELLURIDES
TELLURIUM COMPOUNDS
THERMAL RADIATION