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Multiple-pulse damage thresholds of optical components for excimer lasers

Conference ·
OSTI ID:552294
; ;  [1]
  1. Laser-Laboratorium Goettingen (Germany)
For characterization of the long-term stability of UV optical components a set-up for determination of multiple-pulse (`S-on-l`) damage thresholds has been developed. Using a high power excimer laser (250W, 25ns), `S-on-1` damage thresholds were measured at 248nm for bare UV substrates as well as high- and anti-reflective dielectric coatings, indicating characteristic dependencies on the number of applied laser pulses and pulse repetition rates (up to 300Hz). It could be demonstrated that the multiple pulse threshold of dielectric coatings strongly depends on the thermal conductivity of the substate. In addition, stability tests were performed at 308nm on Al{sub 2}O{sub 3}/SiO{sub 2} HR coatings applying 10{sup 8} pulses of up to 400mJ/cm{sup 2}. Although the samples did withstand this long-term irradiation without damage, a slight degradation of the optical properties and a laser-induced contamination layer on the irradiated area were observed.
Research Organization:
International Society for Optical Engineering, Washington, DC (United States)
OSTI ID:
552294
Report Number(s):
CONF-961070--Vol.2966; CNN: Grant 13EU0137
Country of Publication:
United States
Language:
English