Characterization of absorption and degradation on optical components for high power excimer lasers

Conference · Tue Dec 31 04:00:00 EST 1996

OSTI ID:552025

Mann, K; Eva, E; Granitza, B ^[1]

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1. Laser-Laboratorium Goettingen e.V., Goettingen (Germany)

At Laser-Laboratorium Goettingen, the performance of UV optical components for high power excimer lasers is characterized, aiming to employ testing procedures that meet industrial conditions, i.e. very high pulse numbers and repetition rates. Measurements include determination of single and multiple pulse damage thresholds, absorption loss and degradation of optical properties under long-term irradiation. Absorption of excimer laser pulses is investigated by a calorimetric technique which provides greatly enhanced sensitivity compared to transmissive measurements. Thus, it allows determining both single and two photon absorption coefficients at intensities of standard excimer lasers. Results of absorption measurements at 248nm are presented for bare substrates (CaF{sub 2}, BaF{sub 2}, z-cut quartz and fused silica). UV calorimetry is also employed to investigate laser induced aging phenomena, e.g. color center formation in fused silica. A separation of transient and cumulative effects as a function of intensity is achieved, giving insight into various loss mechanisms.

• Research Organization: International Society for Optical Engineering, Washington, DC (United States)
• OSTI ID: 552025
• Report Number(s): CONF-9510106--Vol.2714
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
ABSORPTION
AGING
BARIUM FLUORIDES
CALCIUM FLUORIDES
COLOR CENTERS
DAMAGE
EXCIMER LASERS
LASER RADIATION
OPTICAL SYSTEMS
QUARTZ
SILICA
ULTRAVIOLET RADIATION