Effects of ion-implantation damage on the first-order Raman spectra of GaP

Journal Article · Thu Sep 01 04:00:00 EDT 1983 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.332773· OSTI ID:5522365

Myers, D R; Gourley, P L; Peercy, P S

We have analyzed the effects of ion-implantation-induced damage on the first-order Raman spectra of GaP, and have correlated changes in the Raman spectra with direct measurements of implantation-induced surface stresses. We find that, at low ion fluences, the effects of implantation damage are to produce point defects that remove free carriers from doped material and to produce stresses in the undamaged regions. In this regime, the stress-induced shifts of the Raman lines can be predicted from the known elastic constants of undamaged GaP. At intermediate fluences, implantation damage alters the elastic properties of GaP so that the stress-induced shifts of the Raman lines are less than those predicted from the properties of the undamaged crystal. At higher doses, implantation-induced surface stresses exceed the elastic limit of the damaged material. This plastic deformation of the implanted surface is accompanied by a rapid broadening of the phonon lines in the first-order Raman spectra.

• Research Organization: Sandia National Laboratories, Albuquerque, New Mexico 87185
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 5522365
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 54:9; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360605* -- Materials-- Radiation Effects
ARGON IONS
CARBON IONS
CHARGED PARTICLES
DAMAGE
DEFORMATION
DOPED MATERIALS
ELASTICITY
ENERGY RANGE
GALLIUM COMPOUNDS
GALLIUM PHOSPHIDES
HELIUM IONS
ION IMPLANTATION
IONS
KEV RANGE
KEV RANGE 10-100
KEV RANGE 100-1000
LINE BROADENING
MATERIALS
MECHANICAL PROPERTIES
PHONONS
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PHYSICAL RADIATION EFFECTS
PLASTICITY
PNICTIDES
QUASI PARTICLES
RADIATION EFFECTS
RAMAN SPECTRA
SPECTRA
STRESSES
TENSILE PROPERTIES
VISIBLE SPECTRA