Structural properties of titanium dioxide films deposited in an rf glow discharge
An rf glow discharge has been used to promote the reaction between titanium tetrachloride and oxygen in order to deposit thin films of titanium dioxide at low temperatures. Structural properties of the films have been studied as functions of deposition temperature (25 to 700 /sup 0/C) and of substrate material (Si, sapphire, glass, NaCl, and Ti). Films deposited onto glass substrates were amorphous at temperatures less than 300 /sup 0/C, anatase at 300 and 400 /sup 0/C, a mixture of anatase and rutile at 500 /sup 0/C, and only rutile at 600 /sup 0/C and above. Films deposited on the other substrates showed similar behavior but the temperatures for specific crystalline forms differed for each substrate material. Deposition at low power densities and 400 /sup 0/C resulted in large (approx.5 ..mu..m) anatase crystallites in 1--2 ..mu..m films.
- Research Organization:
- Materials and Molecular Research Division, Lawrence Berkeley Laboratory
- OSTI ID:
- 5487832
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 1:4; ISSN JVTAD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
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Cermets
& Refractories-- Structure & Phase Studies
ALKALI METAL COMPOUNDS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
AMORPHOUS STATE
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL REACTIONS
CHEMICAL VAPOR DEPOSITION
CHLORIDES
CHLORINE COMPOUNDS
COATINGS
COHERENT SCATTERING
CORUNDUM
CRYSTAL STRUCTURE
DEPOSITION
DIFFRACTION
ELECTRIC DISCHARGES
ELECTRON MICROSCOPY
ELEMENTS
FILMS
GLASS
GLOW DISCHARGES
HALIDES
HALOGEN COMPOUNDS
HIGH TEMPERATURE
MEDIUM TEMPERATURE
METALS
MICROSCOPY
MINERALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PLASMA
SAPPHIRE
SCANNING ELECTRON MICROSCOPY
SCATTERING
SEMIMETALS
SILICON
SODIUM CHLORIDES
SODIUM COMPOUNDS
SPUTTERING
SURFACE COATING
SURFACES
TEMPERATURE EFFECTS
TITANIUM
TITANIUM CHLORIDES
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
TRANSMISSION ELECTRON MICROSCOPY
VAPOR DEPOSITED COATINGS
X-RAY DIFFRACTION