Neutralization of sample charging in secondary ion mass spectrometry via a pulsed extraction field

Journal Article · Wed Aug 01 04:00:00 EDT 1990 · Analytical Chemistry (Washington); (United States)

DOI:https://doi.org/10.1021/ac00214a030· OSTI ID:5479427

Appelhans, A D; Dahl, D A; Delmore, J E ^[1]

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1. Idaho National Engineering Laboratory, Idaho Falls (USA)

A technique has been developed for preventing surface charging of electrically nonconducting samples in secondary ion mass spectrometry (SIMS) when a negative ion or neutral primary beam (but not a positive ion primary beam) is used. Positive and negative particles are alternately extracted from the sample by rapidly reversing the polarity of the secondary ion extraction voltage such that the emission of positive and negative charge is balanced and the sample remains neutral. The technique is nonintrusive, is applicable to all materials, and will permit the interlaced acquisition of positive and negative secondary ion spectra. The technique is demonstrated with a static-SIMS instrument utilizing a negative ion and neutral molecular primary beam. Both positive and negative secondary ion spectra of several highly nonconducting samples are shown.

• OSTI ID: 5479427
• Journal Information: Analytical Chemistry (Washington); (United States), Journal Name: Analytical Chemistry (Washington); (United States) Vol. 62:15; ISSN 0003-2700; ISSN ANCHA
• Country of Publication: United States
• Language: English

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