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Lifetime extension of XeCl and KrCl lasers with additives

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.91658· OSTI ID:5477563

The stabilization and extension of operation of XeCl (308 nm) and KrCl (222 nm) excimer lasers by the addition of very low concentrations of hydrogen gas is described. Lifetime extension of a sealed-off XeCl laser operating at 8 W and 150 Hz is reported, with more than three million shots to half power. Spectroscopic analysis of the laser gas indicates a large reduction in a discharge-induced absorption feature below 230 nm; no absorption is observed at 308 nm.

Research Organization:
Lumonics Research Limited, 105 Schneider Road, Kanata, Ontario, Canada, K2K 1Y3
OSTI ID:
5477563
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 36:12; ISSN APPLA
Country of Publication:
United States
Language:
English