Low energy metal ion source

Journal Article · Wed Jan 01 04:00:00 EST 1992 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States)

DOI:https://doi.org/10.1116/1.578145· OSTI ID:5412231

Godechot, X; Brown, I G ^[1]

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1. Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720 (United States)

We report here on some preliminary investigations of the characteristics of a metal vapor vacuum arc ion source operating in a low voltage mode so as to produce high current beams of metal ions at low energy. The 10-cm diameter, multiaperture beam formation electrodes were configured to an almost-symmetric accel--decel potential arrangement, and in this preliminary work the accel voltage was limited to just 4 kV. We produced a pulsed titanium ion beam with current up to 100 mA at 1.5 kV net extractor voltage.

• DOE Contract Number: AC03-76SF00098
• OSTI ID: 5412231
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States) Vol. 10:1; ISSN JVTAD; ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
430301* -- Particle Accelerators-- Ion Sources
BEAM CURRENTS
CHARGED PARTICLES
CURRENTS
ELECTRIC ARCS
ELECTRIC CURRENTS
ELECTRIC DISCHARGES
ION SOURCES
IONS
MILLI AMP BEAM CURRENTS
PERFORMANCE TESTING
PULSE TECHNIQUES
TESTING
TITANIUM IONS