Performance of a high-current metal vapor vacuum arc ion source

Journal Article · Sat Dec 01 04:00:00 EST 1990 · Review of Scientific Instruments; (USA)

DOI:https://doi.org/10.1063/1.1141552· OSTI ID:6204364

Shiraishi, H ^[1]; Brown, I G ^[2]

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1. Nippon Steel Corporation, 46-59 Nakabaru, Tobata-ku, Kitakyusyu-city (Japan)
2. Lawrence Berkeley Laboratory, University of California, Berkley, CA (USA)

The operational characteristics of a metal vapor vacuum arc ion source have been studied. The beam current has been measured as a function of ion source extraction voltage (5--80 kV), arc current (50--250 A), metal-ion species (Ti, Ta, and Pb), and extractor grid spacing (0.89 and 0.38 cm). The measured beam current ranged up to 700 mA. The parametric variation of beam current is compared to that expected from the Child--Langmuir equation and excellent agreement is found.

• DOE Contract Number: AC03-76SF00098
• OSTI ID: 6204364
• Journal Information: Review of Scientific Instruments; (USA), Journal Name: Review of Scientific Instruments; (USA) Vol. 61:12; ISSN RSINA; ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BEAM CURRENTS
BEAM EXTRACTION
BEAMS
CURRENTS
DESIGN
ELECTRIC ARCS
ELECTRIC CURRENTS
ELECTRIC DISCHARGES
ELEMENTS
EVAPORATION
ION BEAMS
ION SOURCES
LEAD
METALS
PERFORMANCE
PHASE TRANSFORMATIONS
PLASMA PRODUCTION
TANTALUM
TITANIUM
TRANSITION ELEMENTS
VACUUM EVAPORATION