Low energy vacuum arc ion source

Journal Article · Fri Apr 01 04:00:00 EST 1994 · Review of Scientific Instruments; (United States)

DOI:https://doi.org/10.1063/1.1145239· OSTI ID:5020640

Brown, I G; Anders, S; Dickinson, M R; Fojas, P B; MacGill, R A ^[1]

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1. Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720 (United States)

We have developed a version of vacuum arc ion source that produces a metal ion beam with energy of order 1 keV. The ion beam extractor is a three-grid, multiaperture configuration with a low accel--decel ratio so that ions are extracted from the plasma at a relatively high energy and then decelerated to the desired net beam energy. We have tentatively given this ion source the name [ital leva], for low energy vacuum arc ion source. The [ital leva] source is cylindrical in shape with diameter about 6 cm and length about 16 cm and is located completely within the vacuum system; it is constructed from metal and alumina only and can be baked. We have operated it at net extraction voltages in the range 0.5--10 kV and produced a titanium ion beam current of up to 120 mA. Here we describe the source construction details and its performance.

• DOE Contract Number: AC03-76SF00098
• OSTI ID: 5020640
• Journal Information: Review of Scientific Instruments; (United States), Journal Name: Review of Scientific Instruments; (United States) Vol. 65:4; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

661220* -- Particle Beam Production & Handling
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BEAM CURRENTS
BEAM EXTRACTION
CHARGED PARTICLES
CURRENTS
DESIGN
ELECTRIC ARCS
ELECTRIC CURRENTS
ELECTRIC DISCHARGES
ENERGY RANGE
ION SOURCES
IONS
KEV RANGE
KEV RANGE 01-10
MILLI AMP BEAM CURRENTS
PLASMA DENSITY
TITANIUM IONS
Ta
Targets-- (1992-)