Vacuum arc ion sources{emdash}Micro to macro

Journal Article · Fri Mar 01 04:00:00 EST 1996 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.1146734· OSTI ID:279250

MacGill, R A; Dickinson, M R; Brown, I G ^[1]

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1. Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720 (United States)

Vacuum arc ion sources provide a convenient tool for the production of intense beams of metal ions. The sources are relatively easy to construct and they can produce beams from all of the solid metals as well as from compounds, alloys, and mixtures. We have made a number of different kinds of such sources over the course of our development work at LBL in the past decade, from very small {open_quote}{open_quote}thumb-size{close_quote}{close_quote} versions to a very large one with a 50 cm diameter extractor. Beam current ranges from a few milliamperes up to almost 10 A and extraction voltage from about 1 to 100 kV. Multicathode versions have been made so that one can switch between metal ion species simply and quickly. Most of the sources have been operated in a repetitively pulsed mode, and we{close_quote}ve also tested a dc version. Here we outline some construction features of the array of vacuum arc ion sources that we{close_quote}ve developed and used, and describe their performance and limitations. {copyright} {ital 1996 American Institute of Physics.}

• Research Organization: Lawrence Berkeley National Laboratory
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 279250
• Report Number(s): CONF-9509125--
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 3 Vol. 67; ISSN RSINAK; ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
66 PHYSICS
DESIGN
ION SOURCES
METALS
MILLI AMP BEAM CURRENTS
PERFORMANCE
VACUUM SYSTEMS