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Vacuum arc ion sources - micro to macro

Conference ·
OSTI ID:135156

Vacuum arc ion sources provide a convenient tool for the production of intense beams of metal ions. The sources are relatively easy to construct and they can produce beams from all of the solid metals as well as of compounds, alloys and mixtures. We have made a number of different kinds of such sources over the course of our development work at LBL in the past decade, from very small {open_quote}thumb-size{close_quote} versions to a very large one with 50-cm diameter extractor. Beam current ranges from a few milliamperes up to almost 10 amperes and extraction voltage from about 1 kV to 100 kV. Multicathode versions have been made so that one can switch between metal ion species simply and quickly. Most of the sources have been operated in a repetitively pulsed mode, and we`ve tested a dc version also. Here we outline some construction features of the array of vacuum arc ion sources that we`ve developed and used, and describe their performance and limitations.

Research Organization:
Lawrence Berkeley Lab., CA (United States)
Sponsoring Organization:
USDOE, Washington, DC (United States); Department of Defense, Washington, DC (United States); Electric Power Research Inst., Palo Alto, CA (United States)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
135156
Report Number(s):
LBL--37220; CONF-9509125--12; ON: DE96002553
Country of Publication:
United States
Language:
English

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