Annealing-related conductivity conversion in lightly Fe-doped n-type InP wafers
Conference
·
OSTI ID:541062
- CNR-MASPEC Inst., Parma (Italy)
As-grown semiconducting InP wafers containing iron at a level between 5 and 8 {times} 10{sup 15} cm{sup {minus}3} were seen to convert to semi-insulating, with high resistivity and good mobility, after a thermal treatment at 900 C. This fact is interesting since it allows the preparation of semi-insulating InP with Fe content substantially lower than in standard LEC material. In this paper the authors report the annealing parameters and the results of an extensive electro-optical characterization of the treated samples. The experimental results suggest that the conductivity drop is mainly due to a considerable loss of shallow donors.
- OSTI ID:
- 541062
- Report Number(s):
- CONF-960450--; ISBN 0-7803-3179-6
- Country of Publication:
- United States
- Language:
- English
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