Semi-insulating behavior of n-type lightly Fe-doped InP wafers after thermal annealing
- CNR-MASPEC Inst., Parma (Italy)
- INSA URA, Villeurbanne (France)
As-grown Fe-doped semiconducting (SC) InP samples (residual carrier concentration {le} 10{sup 15} cm{sup {minus}3}, estimated iron concentration 6--8 {times} 10{sup 15} cm{sup {minus}3}) were seen to convert to semi-insulating (SI), with high resistivity and good mobility, when annealed under appropriate conditions. This fact is very interesting since it gives the opportunity of obtaining semi-insulating InP with low Fe content. In this paper the authors report the annealing parameters together with the results of an extensive characterization (by Hall effect, C-V, IR absorption and PITCS) of the treated samples. The results suggest that the conductivity drop is related to a considerable loss of shallow donors.
- OSTI ID:
- 536224
- Report Number(s):
- CONF-960498--; ISBN 0-7803-3283-0
- Country of Publication:
- United States
- Language:
- English
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