Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Heteroepitaxy of MOCVD grown TiO sub 2 , VO sub 2 films and TiO sub 2 /VO sub 2 multilayers on sapphire (11 2 0)

Conference ·
OSTI ID:5392350

Single-crystal TiO{sub 2} and VO{sub 2} films in single- and multilayered configurations have been successfully grown on sapphire (1120) by the MOCVD technique. The epitaxial orientation relationships were determined by the X-ray diffraction and transmission electron microscopy techniques. High resolution electron microscopy studies were performed to examine the microstructures of the films at atomic level. 14 refs., 3 figs.

Research Organization:
Argonne National Lab., IL (United States)
Sponsoring Organization:
DOE; USDOE, Washington, DC (United States)
DOE Contract Number:
W-31109-ENG-38
OSTI ID:
5392350
Report Number(s):
ANL/CP-73356; CONF-9107171--1; ON: DE91018589
Country of Publication:
United States
Language:
English