Soft X-ray emission from a CO/sub 2/ laser-heated Z-pinch plasma

Journal Article · Tue Sep 01 04:00:00 EDT 1987 · Plasma Chem. Plasma Process.; (United States)

DOI:https://doi.org/10.1007/BF01016523· OSTI ID:5387091

Tucker, J E; Gilgenbach, R M

The authors report results of soft X-ray measurements in which a high-power (10/sup 10/-10/sup 11/ W/cm/sup 2/) CO/sub 2/ laser was used to heat a near critical density (<10/sup 19/ cm/sup -3/) helium Z-pinch plasma. Frequency-integrated X-ray data show that the unheated Z-pinch plasma is Maxwellian with a temperature of about 30 eV. During laser heating, the X-ray emissions were enhanced over the unheated emissions. Analysis of the experimental X-ray spectra indicate that the low-energy portion of the X-ray emission spectrum (up to 600 eV) is enhanced over the baseline 30 eV Maxwellian emissions. This result is consistent with an inverse bremsstrahlung-modified distribution which results when the plasma heating rate is more rapid than the collisional thermalization rate. These results suggest that it may be possible to enhance the soft X-ray yield of a plasma lithographic source with laser heating.

• Research Organization: Univ. of Michigan, Ann Arbor (USA)
• OSTI ID: 5387091
• Journal Information: Plasma Chem. Plasma Process.; (United States), Journal Name: Plasma Chem. Plasma Process.; (United States) Vol. 7:3; ISSN PCPPD
• Country of Publication: United States
• Language: English

Related Subjects

38 RADIATION CHEMISTRY, RADIOCHEMISTRY, AND NUCLEAR CHEMISTRY
400600* -- Radiation Chemistry
BOLTZMANN STATISTICS
BREMSSTRAHLUNG
CARBON DIOXIDE LASERS
CHARGED PARTICLES
ELECTROMAGNETIC RADIATION
EMISSION
ENERGY RANGE
EQUIPMENT
ETCHING
EV RANGE
EV RANGE 10-100
EV RANGE 100-1000
GAS LASERS
HEATING
HELIUM IONS
IONIZING RADIATIONS
IONS
LASER-RADIATION HEATING
LASERS
PINCH EFFECT
PLASMA
PLASMA DENSITY
PLASMA HEATING
RADIATION SOURCES
RADIATIONS
SOFT X RADIATION
SPECTRA
SURFACE FINISHING
X RADIATION
X-RAY EQUIPMENT
X-RAY SOURCES
X-RAY SPECTRA