Collisionless electron heating in inductively coupled discharges

Journal Article · Mon Sep 01 04:00:00 EDT 1997 · Physics of Plasmas

DOI:https://doi.org/10.1063/1.872455· OSTI ID:538460

Shaing, K C; Aydemir, A Y ^[1]

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1. Institute for Fusion Studies, The University of Texas at Austin, Austin, Texas 78712 (United States)

A kinetic theory of collisionless electron heating is developed for inductively coupled discharges with a finite length L. The novel effect associated with the finite-length system is the resonance between the bounce motion of the electrons and the wave frequency, leading to enhanced heating. The theory is in agreement with results of electromagnetic particle simulations. {copyright} {ital 1997 American Institute of Physics.}

• Research Organization: Univesity of Texas
• DOE Contract Number: FG03-96ER54346
• OSTI ID: 538460
• Journal Information: Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 9 Vol. 4; ISSN PHPAEN; ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ELECTRIC DISCHARGES
IMPEDANCE
KINETIC EQUATIONS
PLASMA HEATING
RESONANCE