skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Electron heating in inductively coupled discharges

Abstract

An analytic expression for the surface impedance for electron heating in inductively coupled discharges is derived from the kinetic equation with the optimum ordering that {nu}{approximately}{omega}. Here, {nu} is the electron collision frequency, and {omega} is the frequency of the driven current inside the antenna coil. The expression is valid for both collisional and collisionless discharges, and can be employed in the modeling of the source. {copyright} {ital 1996 American Institute of Physics.}

Authors:
 [1]
  1. Institute for Fusion Studies, The University of Texas at Austin, Austin, Texas 78712 (United States)
Publication Date:
OSTI Identifier:
286950
Resource Type:
Journal Article
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Volume: 3; Journal Issue: 9; Other Information: PBD: Sep 1996
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION; ELECTRIC DISCHARGES; PLASMA HEATING; KINETIC EQUATIONS; PLASMA PRODUCTION; MAXWELL EQUATIONS; DISTRIBUTION FUNCTIONS; COLLISIONAL PLASMA; INDUCTIVELY COUPLED PLASMA; PLASMA SOURCES

Citation Formats

Shaing, K C. Electron heating in inductively coupled discharges. United States: N. p., 1996. Web. doi:10.1063/1.871598.
Shaing, K C. Electron heating in inductively coupled discharges. United States. doi:10.1063/1.871598.
Shaing, K C. Sun . "Electron heating in inductively coupled discharges". United States. doi:10.1063/1.871598.
@article{osti_286950,
title = {Electron heating in inductively coupled discharges},
author = {Shaing, K C},
abstractNote = {An analytic expression for the surface impedance for electron heating in inductively coupled discharges is derived from the kinetic equation with the optimum ordering that {nu}{approximately}{omega}. Here, {nu} is the electron collision frequency, and {omega} is the frequency of the driven current inside the antenna coil. The expression is valid for both collisional and collisionless discharges, and can be employed in the modeling of the source. {copyright} {ital 1996 American Institute of Physics.}},
doi = {10.1063/1.871598},
journal = {Physics of Plasmas},
number = 9,
volume = 3,
place = {United States},
year = {1996},
month = {9}
}