Electron heating in inductively coupled discharges
- Institute for Fusion Studies, The University of Texas at Austin, Austin, Texas 78712 (United States)
An analytic expression for the surface impedance for electron heating in inductively coupled discharges is derived from the kinetic equation with the optimum ordering that {nu}{approximately}{omega}. Here, {nu} is the electron collision frequency, and {omega} is the frequency of the driven current inside the antenna coil. The expression is valid for both collisional and collisionless discharges, and can be employed in the modeling of the source. {copyright} {ital 1996 American Institute of Physics.}
- OSTI ID:
- 286950
- Journal Information:
- Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 9 Vol. 3; ISSN 1070-664X; ISSN PHPAEN
- Country of Publication:
- United States
- Language:
- English
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