Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Quasilinear theory of collisionless electron heating in radio frequency gas discharges

Journal Article · · Physics of Plasmas
DOI:https://doi.org/10.1063/1.872222· OSTI ID:530108
; ;  [1]
  1. Experimental Physics II, Ruhr-University, 44780 Bochum (Germany)

On the basis of quasilinear kinetic theory, the electron heating of rf discharges is treated for characteristic scale lengths of the heating field much shorter than the electron mean free path. The analysis considers plasmas bounded by walls providing specular reflection. The expressions for the coefficients of electron diffusion in energy space are obtained and analyzed for inductively and capacitively coupled plasmas. Accounting for the oscillatory spatial structure of the penetrating electric field in the regime of anomalous skin effect leads to a decrease of the diffusion coefficient for high, and an increase for low, energy electrons. It is shown that the presence of a second boundary in the case of collisionless plasma slabs results in a similar effect. The formation of energy distribution functions in various regimes of collisionless heating is discussed. The diffusion coefficients are presented taking into account ambipolar electric fields. {copyright} {ital 1997 American Institute of Physics.}

OSTI ID:
530108
Journal Information:
Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 7 Vol. 4; ISSN PHPAEN; ISSN 1070-664X
Country of Publication:
United States
Language:
English

Similar Records

Collisionless electron heating by radio frequency bias in low gas pressure inductive discharge
Journal Article · Sun Dec 09 23:00:00 EST 2012 · Applied Physics Letters · OSTI ID:22089596

Effects of electron cyclotron resonance heating (ECRH)-induced direct loss flux on neoclassical transport in a bumpy stellarator
Journal Article · Wed Aug 15 00:00:00 EDT 2007 · Physics of Plasmas · OSTI ID:21072642

Macroscopic modeling of radio-frequency plasma discharges
Journal Article · Mon May 01 00:00:00 EDT 1989 · J. Vac. Sci. Technol., A; (United States) · OSTI ID:6167778