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U.S. Department of Energy
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Heteroepitaxy on silicon II

Conference ·
OSTI ID:5370177

These proceedings collect papers on silicon epitaxy. Topics include: Molecular beam epitaxy, chemical vapor deposition, annealing, transmission electron microscopy, semiconductor device fabrication, doped materials, gallium arsenide, and gallium phosphides.

OSTI ID:
5370177
Report Number(s):
CONF-8704252--; ISBN: 0-0931837-58-3
Country of Publication:
United States
Language:
English