Preparation of superconducting Y-Ba-Cu-O films by a reactive plasma evaporation method

Journal Article · Mon Apr 11 04:00:00 EDT 1988 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.99679· OSTI ID:5369717

Terashima, K; Eguchi, K; Yoshida, T; Akashi, K

Y-Ba-Cu-O superconducting films were prepared by a reactive plasma evaporation method, in which mixed powders were coevaporated in a thermal radio-frequency Ar+O/sub 2/ plasma and the ternary composition controlled high-temperature metallic vapors were codeposited onto a substrate. The deposition rate was much more than 10 ..mu..m/min, which is several orders of magnitude higher than those reported by the other methods previously. The structure of the prepared films was identified as an orthorhombic oxygen-deficient perovskite phase and some films showed the preferred orientation of (001). The as-deposited film without post-annealing showed a superconducting transition temperature T/sub c//sub m/ (midpoint) of 94 K.

• Research Organization: Faculty of Engineering, Department of Metallurgy and Materials Science, The University of Tokyo, Hongo 7-3-1, Bunkyo-ku, Tokyo 113, Japan
• OSTI ID: 5369717
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 52:15; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COATINGS
COPPER COMPOUNDS
COPPER OXIDES
CRYSTAL STRUCTURE
DATA
DEPOSITION
EXPERIMENTAL DATA
FABRICATION
FILMS
INFORMATION
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MEDIUM TEMPERATURE
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PEROVSKITES
PHYSICAL PROPERTIES
PLASMA
SUPERCONDUCTING FILMS
SURFACE COATING
THERMODYNAMIC PROPERTIES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VAPOR DEPOSITED COATINGS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES