Y-Ba-Cu-O superconducting thin films by simultaneous or sequential evaporation
Journal Article
·
· Appl. Phys. Lett.; (United States)
Superconducting thin films of Y-Ba-Cu-O near the 1:2:3 stoichiometry were produced by simultaneous (coevaporation) and sequential (multilayer) evaporation in the same evaporator. The best film obtained on yttria-stabilized zirconia (YSZ) had a superconducting onset temperature of 104 K, a midpoint T/sub c/ of 92 K, and zero resistance at Tless than or equal to74 K. Stoichiometry was deduced by inductively coupled plasma emission spectroscopy, and elemental depth profiles were obtained by x-ray photoelectron spectroscopy. Film stoichiometry changes only near the film/substrate boundary for films on YSZ. Films on Si/SiO/sub 2/ were not superconducting; depth profiling shows severe changes of film composition with depth. A major theme of this work is process reproducibility, which was found to be poor for coevaporation but improved considerably for sequential evaporation.
- Research Organization:
- GE Research and Development Center, Schenectady, New York 12301
- OSTI ID:
- 5680381
- Journal Information:
- Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 52:7; ISSN APPLA
- Country of Publication:
- United States
- Language:
- English
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Journal Article
·
Wed Feb 28 23:00:00 EST 1990
· Journal of Applied Physics; (USA)
·
OSTI ID:7171441
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· Applied Physics Letters; (USA)
·
OSTI ID:5663453
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· Appl. Phys. Lett.; (United States)
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OSTI ID:5369717
Related Subjects
36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
DATA
DEPOSITION
ELECTRON SPECTROSCOPY
EVAPORATION
EXPERIMENTAL DATA
FABRICATION
FILMS
INFORMATION
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHOTOELECTRON SPECTROSCOPY
PHYSICAL PROPERTIES
SPECTROSCOPY
STOICHIOMETRY
SUPERCONDUCTING FILMS
SURFACE COATING
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
DATA
DEPOSITION
ELECTRON SPECTROSCOPY
EVAPORATION
EXPERIMENTAL DATA
FABRICATION
FILMS
INFORMATION
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHOTOELECTRON SPECTROSCOPY
PHYSICAL PROPERTIES
SPECTROSCOPY
STOICHIOMETRY
SUPERCONDUCTING FILMS
SURFACE COATING
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES