Processing of silicon solar cells by ion implantation and laser annealing. Final report
Technical Report
·
OSTI ID:5356475
Methods to improve the radiation tolerance of silicon cells for spacecraft use are described. The major emphasis of the program was to reduce the process-induced carbon and oxygen impurities in the junction and base regions of the solar cell, and to measure the effect of reduced impurity levels on the radiation tolerance of cells. Substrates of 0.1, 1.0 and 10.0 ohm-cm float-zone material were used as starting material in the process sequence. High-dose, low-energy ion implantation was used to form the junction in n+p structures. Implant annealing was performed by conventional furnace techniques and by pulsed laser and pulsed electron beam annealing. Cells were tested for radiation tolerance at Spire and NASA-LeRC. After irradiation by 1 MeV electrons to a fluence of 10 to the 16th power per sq cm, the cells tested at Spire showed no significant process induced variations in radiation tolerance. However, for cells tested at Lewis to a fluence of 10 to the 15th power per sq cm, ion-implanted cells annealed in vacuum by pulsed electron beam consistently showed the best radiation tolerance for all cell resistivities.
- Research Organization:
- Spire Corp., Bedford, MA (USA)
- OSTI ID:
- 5356475
- Report Number(s):
- NASA-CR-165283
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
140600 -- Solar Energy-- Photovoltaic Power Systems
ANNEALING
BEAMS
DIRECT ENERGY CONVERTERS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON BEAMS
ELECTRONIC EQUIPMENT
EQUIPMENT
HEAT TREATMENTS
HEATING
ION IMPLANTATION
LASER-RADIATION HEATING
LEPTON BEAMS
MELTING
PARTICLE BEAMS
PHASE TRANSFORMATIONS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
PHYSICAL RADIATION EFFECTS
PLASMA HEATING
POWER SUPPLIES
RADIATION EFFECTS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SPACECRAFT POWER SUPPLIES
TESTING
ZONE MELTING
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
140600 -- Solar Energy-- Photovoltaic Power Systems
ANNEALING
BEAMS
DIRECT ENERGY CONVERTERS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON BEAMS
ELECTRONIC EQUIPMENT
EQUIPMENT
HEAT TREATMENTS
HEATING
ION IMPLANTATION
LASER-RADIATION HEATING
LEPTON BEAMS
MELTING
PARTICLE BEAMS
PHASE TRANSFORMATIONS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
PHYSICAL RADIATION EFFECTS
PLASMA HEATING
POWER SUPPLIES
RADIATION EFFECTS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SPACECRAFT POWER SUPPLIES
TESTING
ZONE MELTING