Deposition of uniform aluminum films on Kapton laminates by electron beam evaporation

Conference · Sat Jan 01 04:00:00 EST 1977

OSTI ID:5349085

Sherman, D M

Aluminum films 10 ..mu..m thick with a thickness uniformity in the one percent range have been obtained on the Kapton surface of a laminated substrate consisting of Kapton/Kapton/aluminum foil bonded with a thermosetting adhesive. The processing of the substrates before deposition necessary to obtain reasonable deposition cycle times and a minimal amount of deposition system contamination was developed. The laminated substrates required bakeouts both at atmosphere and in high vacuum prior to deposition to permit evaporation at a pressure of 0.1 mPa (1 x 10/sup -6/ torr). The deposited films exhibited a high specular reflectance and were thus mirror-like in appearance. Film resistivity was within 10 percent of that of bulk aluminum, and the films displayed a strong (111) fiber texture.

• Research Organization: Bendix Corp., Kansas City, Mo. (USA)
• DOE Contract Number: EY-76-C-04-0613
• OSTI ID: 5349085
• Report Number(s): BDX-613-1801; CONF-770339-2
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360101* -- Metals & Alloys-- Preparation & Fabrication
360104 -- Metals & Alloys-- Physical Properties
ALUMINIUM
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
DEPOSITION
DIMENSIONS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON BEAM MELTING
ELEMENTS
FABRICATION
MELTING
METALS
OPTICAL PROPERTIES
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
REFLECTIVITY
SURFACE COATING
SURFACE PROPERTIES
THICKNESS