The effects of the catalytic nature of capacitor electrodes on the degradation of ferroelectric Pb(Zr,Ti)O{sub 3} thin films during reductive ambient annealing
- Central Research Laboratory, Hitachi Ltd., P.O. Box 2, Kokubunji, Tokyo 185 (Japan)
The disappearance of ferroelectricity in Pb(Zr{sub 0.52},Ti{sub 0.48})O{sub 3} (PZT) thin-film capacitors, which is caused by heat treatment in a reductive ambience, is investigated. Bare PZT films are not damaged by annealing in a hydrogen-containing atmosphere (H{sub 2} annealing) up to 400{degree}C, whereas a PZT capacitor with Pt electrodes loses its ferroelectricity during annealing at less than 300{degree}C. We have found that the degradation of ferroelectricity depends upon the metal used for the top electrode of the PZT capacitor. The increased degradation in the case of a PZT capacitor with Pt electrodes can be explained by a catalytic reaction on the Pt surface. We have made the ferroelectricity of a Pt/PZT/Pt capacitor retained even after the H{sub 2} annealing at 300{degree}C, or above, simply by oxidizing it before the H{sub 2} annealing. {copyright} {ital 1997 American Institute of Physics.}
- OSTI ID:
- 530042
- Journal Information:
- Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 1 Vol. 82; ISSN JAPIAU; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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