Electrode-induced degradation of Pb(Zr{sub {ital x}}Ti{sub 1{minus}{ital x}})O{sub 3} (PZT) polarization hysteresis characteristics in Pt/PZT/Pt ferroelectric thin-film capacitors
- Central Research Laboratory, Hitachi Ltd., Kokubunji, Tokyo 185 (Japan)
One of the most serious forms of damage that occurs during the integration of Pt/PZT/Pt ferroelectric capacitors [where PZT is Pb(Zr{sub {ital x}}Ti{sub 1{minus}{ital x}})O{sub 3}] is the disappearance of polarization hysteresis characteristics during the passivation process. The hydrogen content of the atmosphere during this process affects the ferroelectric capacitor characteristics. However, the PZT film itself is not damaged by annealing in a hydrogen-containing atmosphere even at 400{degree}C, whereas the Pt/PZT/Pt ferroelectric capacitor loses its polarization hysteresis characteristics at 300{degree}C. The top Pt electrode was found to induce this damage. Possible mechanisms such as stress and a chemical reaction with the Pt catalyst are discussed. {copyright} {ital 1996 American Institute of Physics.}
- OSTI ID:
- 389250
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 21 Vol. 69; ISSN 0003-6951; ISSN APPLAB
- Country of Publication:
- United States
- Language:
- English
Similar Records
H{sub 2} damage of ferroelectric Pb(Zr,Ti)O{sub 3} thin-film capacitors{emdash}The role of catalytic and adsorptive activity of the top electrode
Influence of Zr/Ti ratios on the deformation in the hysteresis loop of Pb(Zr,Ti)O{sub 3} thin film capacitors