Aqueous dryfilm photoresist for thin film network pattern gold electroplating

Conference · Sun Sep 01 00:00:00 EDT 1991

OSTI ID:5287194

Hines, R A

An aqueous dryfilm photoresist was evaluated and selected to replace a solvent based resist for pattern gold electroplating of thin film networks. The aqueous resist not only eliminated solvents from the process but also improved resolution, line width control, and underplating of the resist. The new resist has been used to make TFNs with narrow lines and spaces that could not be made with the old resist. The adhesion of the new resist has produced excellent results on sapphire substrates allowing a low yield TFN, made with an etchback process on evaporated gold, to be coverted to pattern electroplated gold. In contrast with prior positive dryfilm results where snap back'' caused voids around vias, via resistance has been excellent. 1 ref., 1 fig., 3 tabs.

• Research Organization: Allied-Signal Aerospace Co., Kansas City, MO (United States). Kansas City Div.
• Sponsoring Organization: USDOE; USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-76DP00613
• OSTI ID: 5287194
• Report Number(s): KCP-613-4673; CONF-9109259-7; ON: DE92000463
• Resource Relation: Conference: 1. international congress on environmentally conscious manufacturing, Santa Fe, NM (United States), 18 Sep 1991
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
36 MATERIALS SCIENCE
54 ENVIRONMENTAL SCIENCES
GOLD
ELECTROPLATING
PHOTORESISTORS
SOLVENTS
POLLUTION ABATEMENT
ADHESION
ALUMINIUM OXIDES
COMPRESSION STRENGTH
MICROELECTRONIC CIRCUITS
SODIUM HYDROXIDES
SUBSTRATES
THIN FILMS
ALKALI METAL COMPOUNDS
ALUMINIUM COMPOUNDS
CHALCOGENIDES
DEPOSITION
ELECTRICAL EQUIPMENT
ELECTRODEPOSITION
ELECTROLYSIS
ELECTRONIC CIRCUITS
ELEMENTS
EQUIPMENT
FILMS
HYDROGEN COMPOUNDS
HYDROXIDES
LYSIS
MECHANICAL PROPERTIES
METALS
OXIDES
OXYGEN COMPOUNDS
PLATING
RESISTORS
SODIUM COMPOUNDS
SURFACE COATING
TRANSITION ELEMENTS
426000* - Engineering- Components
Electron Devices & Circuits- (1990-)
360101 - Metals & Alloys- Preparation & Fabrication
540220 - Environment
Terrestrial- Chemicals Monitoring & Transport- (1990-)