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GaAs heteroepitaxial growth on Si for solar cells

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.99058· OSTI ID:5285404
Thermal annealing effects on the reduction of dislocation density in GaAs on Si substrates were investigated. The dislocation density in GaAs films grown on Si substrates by metalorganic chamical vapor deposition was reduced by in situ thermal annealing to 2 x 10/sup 6//cm/sup 2/. We have found that the cooling and heating cycle of the GaAs film is most important factor in reducing the dislocation density in thermal annealing. Solar cells fabricated using GaAs films with 5 x 10/sup 6//cm/sup 2/ etch pit density have 18% conversion efficiency for the active area under AM1.5 simulated illumination.
Research Organization:
Nippon Telegraph and Telephone Corporation, Optoelectronics Laboratories, 3-1 Morinosato Wakamiya, Atsugi 234-01, Japan
OSTI ID:
5285404
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 52:19; ISSN APPLA
Country of Publication:
United States
Language:
English