Inversion layer solar cells on chemically vapor-deposited polycrystalline silicon thin films

Journal Article · Wed Feb 15 04:00:00 EST 1984 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.333159· OSTI ID:5266328

Burte, E P; Hezel, R

It is demonstrated that the metal-insulator-semiconductor (MIS) inversion layer (IL) process is also suited to fabricating solar cells on fine-grained polycrystalline silicon thin films prepared by low-pressure chemical-vapor deposition (LPCVD). Plasma enhanced silicon nitride was used as dielectric to create a highly conductive inversion layer at the silicon surface. As revealed by high frequency and quasistatic C-V measurements, the insulator/semiconductor interface for fine-grained LPCVD polycrystalline silicon is similar to that for the coarse-grained Wacker Silso material. An excellent external quantum efficiency in the short wavelength region was obtained for solar cells on both materials. For the 1-cm/sup 2/ solar cell on 2-..cap omega.. cm p-doped LPCVD silicon an active area efficiency of eta/sub a/ = 1.8% was obtained. Ways of improving these cells are suggested. A total area AM1 efficiency of 13% was achieved for coprocessed 4-cm/sup 2/ MIS-IL solar cells on Wacker Silso.

• Research Organization: Institut fuer Werkstoffwissenschaften VI, Universitaet Erlangen-Nuernberg, D-8520 Erlangen, Federal Republic of Germany
• OSTI ID: 5266328
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 55:4; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CRYSTALS
DEPOSITION
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELECTRIC CONDUCTIVITY
ELECTRICAL EQUIPMENT
ELECTRICAL INSULATORS
ELECTRICAL PROPERTIES
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
INTERFACES
MIS SOLAR CELLS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
POLYCRYSTALS
SEMIMETALS
SILICON
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
THIN FILMS