High efficiency inversion layer solar cells on polycrystalline silicon by the application of silicon nitride
Conference
·
· IEEE Trans. Electron Devices; (United States)
OSTI ID:5166707
Plasma enhanced CVD silicon nitride is introduced for the fabrication of inversion layer solar cells on p-type polycrystalline silicon. The same high interface quality as obtained for Si-nitride on monocrystalline silicon could also be achieved for polycrystalline silicon. This includes high interface charge densities up to 6.6*10/sup 12/ cm/sup -2/ and high UV sensitivity of the cells. For 4-cm/sup 2/ polycrystalline metal-insulator-semiconductor inversion layer (MIS/IL) solar cells active area efficiencies up to 13.4 percent (12.3-percent total area efficiency) under AM1 illumination could be reached, the highest values yet reported for polycrystalline silicon inversion layer solar cells on a total area basis. 15 refs.
- Research Organization:
- Univ Erlangen-Nuremberg, Ger
- OSTI ID:
- 5166707
- Report Number(s):
- CONF-810707-
- Conference Information:
- Journal Name: IEEE Trans. Electron Devices; (United States) Journal Volume: ED-28:12
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CRYSTALS
DEPOSITION
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELECTROMAGNETIC RADIATION
EQUIPMENT
FABRICATION
INTERFACES
MIS SOLAR CELLS
NITRIDES
NITROGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PNICTIDES
POLYCRYSTALS
RADIATIONS
SENSITIVITY
SILICON COMPOUNDS
SILICON NITRIDES
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
ULTRAVIOLET RADIATION
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CRYSTALS
DEPOSITION
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELECTROMAGNETIC RADIATION
EQUIPMENT
FABRICATION
INTERFACES
MIS SOLAR CELLS
NITRIDES
NITROGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PNICTIDES
POLYCRYSTALS
RADIATIONS
SENSITIVITY
SILICON COMPOUNDS
SILICON NITRIDES
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
ULTRAVIOLET RADIATION