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U.S. Department of Energy
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Photoresist dip coating on thin film networks. Final report

Technical Report ·
DOI:https://doi.org/10.2172/5259602· OSTI ID:5259602
Application of liquid photoresist by dip coating was investigated as potentially more reliable and repeatable than the current roller coating process. Resist viscosity, extraction rate, and substrate orientation were found to affect applied resist thickness and uniformity. The data accumulated in this effort will be used in future work to develop an improved photoresist application process.
Research Organization:
Bendix Corp., Kansas City, MO (USA)
DOE Contract Number:
AC04-76DP00613
OSTI ID:
5259602
Report Number(s):
BDX-613-2398
Country of Publication:
United States
Language:
English