High charge densities in Si-nitride and their effect on the inversion layer mobility of silicon MIS/IL solar cells
Conference
·
· Conf. Rec. IEEE Photovoltaic Spec. Conf.; (United States)
OSTI ID:5249429
For inversion layer (IL) solar cells a high and stable insulator charge density is required to obtain a low IL sheet resistance. For Si-nitride/thin Si-oxide/p-Si structures, the sheet resistance and the effective IL mobility were determined for very high values of charge density. Despite the IL mobility decreasing with decreasing insulator charge density, the sheet resistance can be significantly lowered. A strong dependence of sheet resistance and effective IL mobility on the oxide treatment is observed. The highest positive charge densities ever reported for MIS devices and IL solar cells could reproducibly be achieved by cesium incorporation into plasma Si-nitride. Their excellent thermal stability and the charge distribution are discussed.
- Research Organization:
- Institut fur Werkstoffwissenschaften VI Universitat Erlangen-Nurnberg, Erlangen
- OSTI ID:
- 5249429
- Report Number(s):
- CONF-820906-
- Conference Information:
- Journal Name: Conf. Rec. IEEE Photovoltaic Spec. Conf.; (United States)
- Country of Publication:
- United States
- Language:
- English
Similar Records
Plasma Si nitride: A promising dielectric to achieve high-quality silicon MIS/IL solar cells
Silicon MIS/inversion-layer solar cells. Final report, October 1, 1981-September 30, 1982
High efficiency inversion layer solar cells on polycrystalline silicon by the application of silicon nitride
Journal Article
·
Tue Mar 31 23:00:00 EST 1981
· J. Appl. Phys.; (United States)
·
OSTI ID:6510537
Silicon MIS/inversion-layer solar cells. Final report, October 1, 1981-September 30, 1982
Technical Report
·
Fri Oct 01 00:00:00 EDT 1982
·
OSTI ID:6507274
High efficiency inversion layer solar cells on polycrystalline silicon by the application of silicon nitride
Conference
·
Mon Nov 30 23:00:00 EST 1981
· IEEE Trans. Electron Devices; (United States)
·
OSTI ID:5166707
Related Subjects
14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
ALGEBRAIC CURRENTS
ALKALI METALS
CESIUM
CHALCOGENIDES
CHARGE DENSITY
CHARGED CURRENTS
CURRENTS
DIRECT ENERGY CONVERTERS
ELECTRIC CONDUCTIVITY
ELECTRICAL EQUIPMENT
ELECTRICAL INSULATORS
ELECTRICAL PROPERTIES
ELEMENTS
EQUIPMENT
LAYERS
METALS
MIS SOLAR CELLS
MOBILITY
NITRIDES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
PNICTIDES
SILICON COMPOUNDS
SILICON NITRIDES
SILICON OXIDES
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
STABILITY
THERMODYNAMICS
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
ALGEBRAIC CURRENTS
ALKALI METALS
CESIUM
CHALCOGENIDES
CHARGE DENSITY
CHARGED CURRENTS
CURRENTS
DIRECT ENERGY CONVERTERS
ELECTRIC CONDUCTIVITY
ELECTRICAL EQUIPMENT
ELECTRICAL INSULATORS
ELECTRICAL PROPERTIES
ELEMENTS
EQUIPMENT
LAYERS
METALS
MIS SOLAR CELLS
MOBILITY
NITRIDES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
PNICTIDES
SILICON COMPOUNDS
SILICON NITRIDES
SILICON OXIDES
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
STABILITY
THERMODYNAMICS