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Improvement of the optical and photoelectric properties of hydrogenated amorphous silicon-carbon alloys by using trisilylmethane as a feedstock

Journal Article · · Applied Physics Letters; (United States)
DOI:https://doi.org/10.1063/1.106229· OSTI ID:5246499
;  [1]
  1. Solarex Corporation, Thin Film Division, 826 Newtown-Yardley Road, Newtown, Pennsylvania (USA)
Hydrogenated amorphous silicon-carbon alloys ({ital a}-SiC:H) with band gaps around 1.9 eV have been prepared using trisilylmethane (TSM) as the carbon source by plasma-enhanced chemical vapor deposition. Compared to {ital a}-SiC:H alloys prepared from the conventional CH{sub 4}/SiH{sub 4} mixture, the TSM-based films show sharper optical-absorption edge, weaker defect-related optical absorption, lower methyl group concentration, longer ambipolar diffusion length, and higher photoconductivity.
OSTI ID:
5246499
Journal Information:
Applied Physics Letters; (United States), Journal Name: Applied Physics Letters; (United States) Vol. 59:14; ISSN APPLA; ISSN 0003-6951
Country of Publication:
United States
Language:
English