Improvement of the optical and photoelectric properties of hydrogenated amorphous silicon-carbon alloys by using trisilylmethane as a feedstock
Journal Article
·
· Applied Physics Letters; (United States)
- Solarex Corporation, Thin Film Division, 826 Newtown-Yardley Road, Newtown, Pennsylvania (USA)
Hydrogenated amorphous silicon-carbon alloys ({ital a}-SiC:H) with band gaps around 1.9 eV have been prepared using trisilylmethane (TSM) as the carbon source by plasma-enhanced chemical vapor deposition. Compared to {ital a}-SiC:H alloys prepared from the conventional CH{sub 4}/SiH{sub 4} mixture, the TSM-based films show sharper optical-absorption edge, weaker defect-related optical absorption, lower methyl group concentration, longer ambipolar diffusion length, and higher photoconductivity.
- OSTI ID:
- 5246499
- Journal Information:
- Applied Physics Letters; (United States), Journal Name: Applied Physics Letters; (United States) Vol. 59:14; ISSN APPLA; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
AMBIPOLAR DIFFUSION
AMORPHOUS STATE
CARBIDES
CARBON COMPOUNDS
CHEMICAL COATING
CHEMICAL REACTIONS
CHEMICAL VAPOR DEPOSITION
DEPOSITION
DIFFUSION
DIRECT ENERGY CONVERTERS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ENERGY GAP
EQUIPMENT
FABRICATION
HYDROGENATION
OPTICAL PROPERTIES
PHOTOCONDUCTIVITY
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
PLASMA
SILICON CARBIDES
SILICON COMPOUNDS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
AMBIPOLAR DIFFUSION
AMORPHOUS STATE
CARBIDES
CARBON COMPOUNDS
CHEMICAL COATING
CHEMICAL REACTIONS
CHEMICAL VAPOR DEPOSITION
DEPOSITION
DIFFUSION
DIRECT ENERGY CONVERTERS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ENERGY GAP
EQUIPMENT
FABRICATION
HYDROGENATION
OPTICAL PROPERTIES
PHOTOCONDUCTIVITY
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
PLASMA
SILICON CARBIDES
SILICON COMPOUNDS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING