Radiation hardness of molybdenum silicon multilayers designed for use in a soft-x-ray projection lithography system

Journal Article · Tue Nov 30 23:00:00 EST 1993 · Applied Optics; (United States)

DOI:https://doi.org/10.1364/AO.32.006991· OSTI ID:5236245

Gaines, D P; Spitzer, R C ^[1]; Ceglio, N M ^[2]; Krumrey, M; Ulm, G ^[3]

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1. Lawrence Livermore National Laboratory, L-395, P.O. Box 5508, Livermore, California 94550 permanent address is Brigham Young University, 296 ESC, Provo, Utah 84601 (United States)
2. Lawrence Livermore National Laboratory, L-395, P.O. Box 5508, Livermore, California 94550 (United States)
3. Physikalisch-Technische Bundesanstalt, Institut Berlin, Abbestrasse 2-12, W-1000 Berlin 10 (Germany)

A molybdenum silicon multilayer is irradiated with 13.4-nm radiation to investigate changes in multilayer performance under simulated soft-x-ray projection lithography (SXPL) conditions. The wiggler--undulator at the Berlin electron storage ring BESSY is used as a quasi-monochromatic source of calculable spectral radiant intensity and is configured to simulate an incident SXPL x-ray spectrum. The test multilayer receives a radiant exposure of 240 J/mm[sup 2] in an exposure lasting 8.9 h. The corresponding average incident power density is 7.5 mW/mm[sup 2]. The absorbed dose of 7.8 [times] 10[sup 10] J/kg (7.8 [times] 10[sup 12] rad) is equivalent to 1.2 times the dose that would be absorbed by a multilayer coating on the first imaging optic in a hypothetical SXPL system during 1 year of operation. Surface temperature increases do not exceed 2 [degree]C during the exposure. Normal-incidence reflectance measurements at [lambda][sub 0] = 13.4 nm performed before radiation exposure are in agreement with measurements performed after the exposure, indicating that no significant damage had occurred.

• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 5236245
• Journal Information: Applied Optics; (United States), Journal Name: Applied Optics; (United States) Vol. 32:34; ISSN 0003-6935; ISSN APOPAI
• Country of Publication: United States
• Language: English

Related Subjects

440200* -- Radiation Effects on Instrument Components
Instruments
or Electronic Systems
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
BESSY STORAGE RING
COATINGS
DOSES
ELECTRICAL EQUIPMENT
ELECTROMAGNETIC RADIATION
ELECTROMAGNETS
ELEMENTS
EQUIPMENT
IONIZING RADIATIONS
MAGNETS
METALS
MOLYBDENUM
PHYSICAL RADIATION EFFECTS
RADIATION DOSE DISTRIBUTIONS
RADIATION DOSES
RADIATION EFFECTS
RADIATIONS
REFLECTIVE COATINGS
SEMIMETALS
SILICON
SOFT X RADIATION
SPATIAL DOSE DISTRIBUTIONS
STORAGE RINGS
TRANSITION ELEMENTS
WIGGLER MAGNETS
X RADIATION