Ion beam induced conductivity and structural changes in diamondlike carbon coatings

Journal Article · Mon Nov 03 04:00:00 EST 1986 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.97452· OSTI ID:5229229

Prawer, S; Kalish, R; Adel, M; Richter, V

Energetic ion beam irradiation of diamondlike carbon thin films induces a decrease of 4--5 orders of magnitude in the resistivity of the films from their as-grown value of 10/sup 7/ ..cap omega.. cm. The initial decrease in resistivity with increasing ion dose is due to the loss of hydrogen from the films with a concomitant decrease in the optical band gap. Heating the films during the irradiation greatly accelerates the rate of hydrogen loss as a function of dose. Once the hydrogen removal is complete, further irradiation increases the film conductivity by inducing the growth of microcrystallites of graphite.

• Research Organization: Solid State Institute, Technion Israel Institute of Technology, Haifa, Israel
• OSTI ID: 5229229
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 49:18; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360605* -- Materials-- Radiation Effects
CARBON
COLLISIONS
CRYSTAL STRUCTURE
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTAL MINERALS
ELEMENTS
ENERGY RANGE
FILMS
GRAPHITE
ION COLLISIONS
KEV RANGE
MICROSTRUCTURE
MINERALS
NONMETALS
PHYSICAL PROPERTIES
PHYSICAL RADIATION EFFECTS
RADIATION EFFECTS